검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Pattern transfer on mask membranes Fisher AH, Engelstad RL, Lovell EG, Puisto DM Journal of Vacuum Science & Technology B, 16(6), 3572, 1998 |
| 2 |
Pattern placement errors in mask membranes Fisher AH, Laudon MF, Engelstad RL, Lovell EG, Cerrina F Journal of Vacuum Science & Technology B, 15(6), 2249, 1997 |