검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
In situ plasma diagnostics study of a commercial high-power hollow cathode magnetron deposition tool Meng L, Raju R, Flauta R, Shin H, Ruzic DN, Hayden DB Journal of Vacuum Science & Technology A, 28(1), 112, 2010 |
| 2 |
Plasma characteristics of a multi-cusp plasma-sputter-type ion source for thin film formation of gallium nitride Flauta R, Kasuya T, Ohachi T, Wada M Journal of Crystal Growth, 237, 2116, 2002 |