검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Scaling of HfO2 dielectric on CVD graphene McDonnell S, Azcatl A, Mordi G, Floresca C, Pirkle A, Colombo L, Kim J, Kim M, Wallace RM Applied Surface Science, 294, 95, 2014 |
| 2 |
Void-free filling of spin-on dielectric in 22 nm wide ultrahigh aspect ratio Si trenches Trivedi K, Floresca C, Kim S, Kim H, Kim D, Kim J, Kim MJ, Hu W Journal of Vacuum Science & Technology B, 27(6), 3145, 2009 |