검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Nonconventional flash annealing on shallow indium implants in silicon Gennaro S, Giubertoni D, Bersani M, Foggiato J, Yoo WS, Gwilliam R Journal of Vacuum Science & Technology B, 24(1), 473, 2006 |
| 2 |
Implementation of flash technology for ultra shallow junction formation: Challenges in process integration Foggiato J, Yoo WS Journal of Vacuum Science & Technology B, 24(1), 515, 2006 |