검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron beam and optical proximity effect reduction for nanolithography: New results Peckerar M, Sander D, Srivastava A, Foli A, Vishkin U Journal of Vacuum Science & Technology B, 25(6), 2288, 2007 |
| No. | Article |
|---|---|
| 1 |
Electron beam and optical proximity effect reduction for nanolithography: New results Peckerar M, Sander D, Srivastava A, Foli A, Vishkin U Journal of Vacuum Science & Technology B, 25(6), 2288, 2007 |