검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Enhancing the efficiency of postetch polymer removal using megasonic wet clean for 0.13-mu m dual damascene interconnect process Chang CK, Foo TH, Murkherjee-Roy M, Bliznetov VN, Li HY Thin Solid Films, 462-63, 292, 2004 |
| No. | Article |
|---|---|
| 1 |
Enhancing the efficiency of postetch polymer removal using megasonic wet clean for 0.13-mu m dual damascene interconnect process Chang CK, Foo TH, Murkherjee-Roy M, Bliznetov VN, Li HY Thin Solid Films, 462-63, 292, 2004 |