화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 H2O Diffusion Barriers at Si-Si Direct Bonding Interfaces for Low Temperature Anneals
Moriceau H, Rieutord F, Libralesso L, Ventosa C, Fournel F, Morales C, Mc Cormick T, Chevolleau T, Radu I
Journal of the Electrochemical Society, 158(9), H919, 2011
2 Hybrid superconductor-semiconductor devices made from self-assembled SiGe nanocrystals on silicon
Katsaros G, Spathis P, Stoffel M, Fournel F, Mongillo M, Bouchiat V, Lefloch F, Rastelli A, Schmidt OG, De Franceschi S
Nature Nanotechnology, 5(6), 458, 2010
3 Mechanism of Thermal Silicon Oxide Direct Wafer Bonding
Ventosa C, Morales C, Libralesso L, Fournel F, Papon AM, Lafond D, Moriceau H, Penot JD, Rieutord F
Electrochemical and Solid State Letters, 12(10), H373, 2009
4 Prebonding Thermal Treatment in Direct Si-Si Hydrophilic Wafer Bonding
Ventosa C, Rieutord F, Libralesso L, Fournel F, Morales C, Moriceau H
Journal of the Electrochemical Society, 156(11), H818, 2009
5 Performance and physics of sub-50 nm strained Si on Si1-xGex-on-insulator (SGOI) nMOSFETs
Andrieu F, Ernst T, Faynot O, Rozeau O, Bogumilowicz Y, Hartmann JM, Brevard L, Toffoli A, Lafond D, Ghyselen B, Fournel F, Ghibaudo G, Deleonibus S
Solid-State Electronics, 50(4), 566, 2006
6 Highly ordered germanium nanostructures grown by molecular beam epitaxy on twist-bonded silicon (001) substrates
Poydenot V, Dujardin R, Fournel F, Rouviere JL, Barski A
Journal of Crystal Growth, 278(1-4), 83, 2005
7 Engineering strained silicon on insulator wafers with the Smart Cut (TM) technology
Ghyselen B, Hartmann JM, Ernst T, Aulnette C, Osternaud B, Bogumilowicz Y, Abbadie A, Besson P, Rayssac O, Tiberj A, Daval N, Cayrefourq I, Fournel F, Moriceau H, Di Nardo C, Andrieu F, Paillard V, Cabie M, Vincent L, Snoeck E, Cristiano F, Rocher A, Ponchet A, Claverie A, Boucaud P, Semeria MN, Bensahel D, Kernevez B, Mazure C
Solid-State Electronics, 48(8), 1285, 2004
8 Nanometric patterning with ultrathin twist bonded silicon wafers
Fournel F, Moriceau H, Magnea N, Eymery J, Buttard D, Rouviere JL, Rousseau K, Aspar B
Thin Solid Films, 380(1-2), 10, 2000