검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fabrication of sawtooth diffraction gratings using nanoimprint lithography Chang CH, Heilmann RK, Fleming RC, Carter J, Murphy E, Bailey TC, Ekerdt JG, Frankel RD, Voisin R Journal of Vacuum Science & Technology B, 21(6), 2755, 2003 |
| 2 |
Novel on-Axis Interferometric Alignment Method with Sub-10-nm Precision Moel A, Moon EE, Frankel RD, Smith HI Journal of Vacuum Science & Technology B, 11(6), 2191, 1993 |