검색결과 : 2건
No. | Article |
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1 |
Plasma-enhanced chemical vapor deposition of SiOx/SiNx Bragg reflectors Gottschalch V, Schmidt R, Rheinlander B, Pudis D, Hardt S, Kvietkova J, Wagner G, Franzheld R Thin Solid Films, 416(1-2), 224, 2002 |
2 |
Effects of organic As-precursors on the incorporation of In and Ga into (GaIn)As films grown by metal-organic vapor-phase epitaxy Kirpal G, Gerhardt M, Gottschalch V, Franzheld R, Semmelhack HC Thin Solid Films, 342(1-2), 113, 1999 |