화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Plasma-enhanced chemical vapor deposition of SiOx/SiNx Bragg reflectors
Gottschalch V, Schmidt R, Rheinlander B, Pudis D, Hardt S, Kvietkova J, Wagner G, Franzheld R
Thin Solid Films, 416(1-2), 224, 2002
2 Effects of organic As-precursors on the incorporation of In and Ga into (GaIn)As films grown by metal-organic vapor-phase epitaxy
Kirpal G, Gerhardt M, Gottschalch V, Franzheld R, Semmelhack HC
Thin Solid Films, 342(1-2), 113, 1999