검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Improvement in linewidth roughness by postprocessing Chandhok M, Frasure K, Putna ES, Younkin TR, Rachmady W, Shah U, Yueh W Journal of Vacuum Science & Technology B, 26(6), 2265, 2008 |
| No. | Article |
|---|---|
| 1 |
Improvement in linewidth roughness by postprocessing Chandhok M, Frasure K, Putna ES, Younkin TR, Rachmady W, Shah U, Yueh W Journal of Vacuum Science & Technology B, 26(6), 2265, 2008 |