검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Fabrication of 22 nm half-pitch silicon lines by single-exposure self-aligned spatial-frequency doubling Raub AK, Li D, Frauenglass A, Brueck SRJ Journal of Vacuum Science & Technology B, 25(6), 2224, 2007 |
| 2 |
Fabrication of 1D and 2D vertical nanomagnetic resonators Zhang S, Fan WJ, Minhas BK, Frauenglass A, Malloy KJ, Brueck SRJ Journal of Vacuum Science & Technology B, 22(6), 3327, 2004 |
| 3 |
Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography Raub AK, Frauenglass A, Brueck SRJ, Conley W, Dammel R, Romano A, Sato M, Hinsberg W Journal of Vacuum Science & Technology B, 22(6), 3459, 2004 |
| 4 |
244-nm imaging interferometric lithography Frauenglass A, Smolev S, Biswas A, Brueck SRJ Journal of Vacuum Science & Technology B, 22(6), 3465, 2004 |