검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A systems-based approach for generating quantitative models of microstructural evolution in silicon materials processing Frewen TA, Sinno T, Haeckl W, von Ammon W Computers & Chemical Engineering, 29(4), 713, 2005 |
| 2 |
A microscopically accurate continuum model for void formation during semiconductor silicon processing Frewen TA, Kapur SS, Haeckl W, von Ammon W, Sinno T Journal of Crystal Growth, 279(3-4), 258, 2005 |