검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Fabrication of three-dimensional structures for the assessment of cell mechanical interactions within cell monolayers Fuard D, Moussus M, Tomba C, Peyrade D, Nicolas A Journal of Vacuum Science & Technology B, 28(6), C6K1, 2010 |
| 2 |
Measurement of residual thickness using scatterometry Fuard D, Perret C, Farys V, Gourgon C, Schiavone P Journal of Vacuum Science & Technology B, 23(6), 3069, 2005 |
| 3 |
High density plasma etching of low k dielectric polymers in oxygen-based chemistries Fuard D, Joubert O, Vallier L, Bonvalot M Journal of Vacuum Science & Technology B, 19(2), 447, 2001 |
| 4 |
Etch mechanisms of low dielectric constant polymers in high density plasmas: Impact of charging effects on profile distortion during the etching process Fuard D, Joubert O, Vallier L, Assous M, Berruyer P, Blanc R Journal of Vacuum Science & Technology B, 19(6), 2223, 2001 |
| 5 |
Plasma polymerized methylsilane. III. Process optimization for 193 nm lithography applications Joubert O, Fuard D, Monget C, Weidman T Journal of Vacuum Science & Technology B, 18(2), 793, 2000 |