검색결과 : 1건
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1 |
Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation Sinha H, Straight DB, Lauer JL, Fuller NC, Engelmann SU, Zhang Y, Antonelli GA, Severson M, Nishi Y, Shohet JL Journal of Vacuum Science & Technology A, 28(6), 1316, 2010 |