검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Spatial light modulator for maskless optical projection lithography Watson GP, Aksyuk V, Simon ME, Tennant DM, Cirelli RA, Mansfield WM, Pardo F, Lopez DO, Bolle CA, Papazian AR, Basavanhally N, Lee J, Fullowan R, Klemens F, Miner J, Kornblit A, Sorsch T, Fetter L, Peabody M, Bower JE, Weiner JS, Low YL Journal of Vacuum Science & Technology B, 24(6), 2852, 2006 |
| 2 |
Evaluation of a 100 kV thermal field emission electron-beam nanolithography system Tennant DM, Fullowan R, Takemura H, Isobe M, Nakagawa Y Journal of Vacuum Science & Technology B, 18(6), 3089, 2000 |