검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ammonia Nitridation of Thermal Polyoxide to Eliminate Epitaxial Ambient Induced Dielectric Pinhole Formation Fultz WW, Neudeck GW Journal of Vacuum Science & Technology B, 14(6), 3465, 1996 |
| No. | Article |
|---|---|
| 1 |
Ammonia Nitridation of Thermal Polyoxide to Eliminate Epitaxial Ambient Induced Dielectric Pinhole Formation Fultz WW, Neudeck GW Journal of Vacuum Science & Technology B, 14(6), 3465, 1996 |