검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Optical properties and band gap characterization of high dielectric constant oxides Fursenko O, Bauer J, Lupina G, Dudek P, Lukosius M, Wenger C, Zaumseil P Thin Solid Films, 520(14), 4532, 2012 |
| 2 |
Doping concentration control of SiGe layers by spectroscopic ellipsometry Fursenko O, Bauer J, Zaumseil P, Yamamoto Y, Tillack B Thin Solid Films, 517(1), 259, 2008 |
| 3 |
Chemical vapor phase etching of polycrystalline selective to epitaxial Si and SiGe Yamamoto Y, Tillack B, Kopke K, Fursenko O Thin Solid Films, 508(1-2), 297, 2006 |
| 4 |
Development of spectroscopic ellipsometry as in-line control for CoSALICIDE process Fursenko O, Bauer J, Goryachko A, Bolze D, Zaumseil P, Krugera D, Wolansky D, Bugiel E, Tillack B Thin Solid Films, 450(2), 248, 2004 |
| 5 |
Characterization of crystalline-amorphous transition by heavy C doping of poly-Si (poly-Si : C) Yamamoto Y, Fursenko O, Kopke K, Bauer J, Bugiel E, Kruger D, Zaumseil P, Tillack B Applied Surface Science, 184(1-4), 221, 2001 |