검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Critical-dimension control for 100 nm patterns in x-ray lithography Tanaka Y, Iwamoto T, Fujii K, Kikuchi Y, Matsui Y, Fukuda M, Morita H Journal of Vacuum Science & Technology B, 17(6), 3415, 1999 |
| No. | Article |
|---|---|
| 1 |
Critical-dimension control for 100 nm patterns in x-ray lithography Tanaka Y, Iwamoto T, Fujii K, Kikuchi Y, Matsui Y, Fukuda M, Morita H Journal of Vacuum Science & Technology B, 17(6), 3415, 1999 |