화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Repair of thin thermally grown silicon dioxide by anodic oxidation
Chen L, Zhou YL, Krause S, Munoz AG, Kunze J, Schmuki P
Electrochimica Acta, 53(8), 3395, 2008
2 Structure and Chemical-Composition of Fluorinated SiO2-Films Deposited Using Sif4/O-2 Plasmas
Han SM, Aydil ES
Journal of Vacuum Science & Technology A, 15(6), 2893, 1997
3 X-Ray Photoelectron-Spectroscopy and X-Ray-Absorption Near-Edge Spectroscopy Study of SiO2/Si(100)
Tao Y, Lu ZH, Graham MJ, Tay SP
Journal of Vacuum Science & Technology B, 12(4), 2500, 1994