검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
High temperature subatmospheric chemical vapor deposited undoped silicate glass - A solution for next generation shallow trench isolation Xia LQ, Nemani S, Galiano M, Pichai S, Chandran S, Yieh E, Cote D, Conti R, Restaino D, Tobben D Journal of the Electrochemical Society, 146(3), 1181, 1999 |
| 2 |
High aspect ratio trench filling using two-step subatmospheric chemical vapor deposited borophosphosilicate glass for < 0.18 mu m device application Xia LQ, Conti R, Galiano M, Campana F, Chandran S, Cote D, Restaino D, Yieh E Journal of the Electrochemical Society, 146(5), 1884, 1999 |
| 3 |
Gap Fill and Film Reflow Capability of Subatmospheric Chemical-Vapor-Deposited Borophosphosilicate Glass Robles S, Russell K, Galiano M, Siva V, Kithcart V, Nguyen BC Journal of the Electrochemical Society, 143(4), 1414, 1996 |