화학공학소재연구정보센터
검색결과 : 11건
No. Article
1 Response of Block Copolymer Thin-Film Morphology to Line-Width Roughness on a Chemoepitaxial Template
Patrone PN, Gallatin GM
Macromolecules, 47(14), 4824, 2014
2 Nanomanufacturing with DNA Origami: Factors Affecting the Kinetics and Yield of Quantum Dot Binding
Ko SH, Gallatin GM, Liddle JA
Advanced Functional Materials, 22(5), 1015, 2012
3 Modeling Line Edge Roughness in Templated, Lamellar Block Copolymer Systems
Patrone PN, Gallatin GM
Macromolecules, 45(23), 9507, 2012
4 Efficiency enhancement of copper contaminated radial p-n junction solar cells
Boukai A, Haney P, Katzenmeyer A, Gallatin GM, Talin AA, Yang PD
Chemical Physics Letters, 501(4-6), 153, 2011
5 Effect of resist on the transfer of line-edge roughness spatial metrics from mask to wafer
Naulleau PP, Gallatin GM
Journal of Vacuum Science & Technology B, 28(6), 1259, 2010
6 Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
Goldfarb DL, Mahorowala AP, Gallatin GM, Petrillo KE, Temple K, Angelopoulos M, Rasgon S, Sawin HH, Allen SD, Lawson MC, Kwong RW
Journal of Vacuum Science & Technology B, 22(2), 647, 2004
7 Statistical limitations of printing 50 and 80 nm contact holes by EUV lithography
Gallatin GM, Houle FA, Cobb JL
Journal of Vacuum Science & Technology B, 21(6), 3172, 2003
8 Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system
Liddle JA, Blakey MI, Bolan K, Farrow RC, Gallatin GM, Kasica R, Katsap V, Knurek CS, Li J, Mkrtchyan M, Novembre AE, Ocola L, Orphanos PA, Peabody ML, Stanton ST, Teffeau K, Waskiewicz WK, Munro E
Journal of Vacuum Science & Technology B, 19(2), 476, 2001
9 SCALPEL aerial image monitoring: Principles and application to space charge
Gallatin GM, Farrow RC, Liddle JA, Waskiewicz WK, Mkrtchyan MM, Orphanos P, Felker J, Kraus J, Biddick CJ, Stanton S, Novembre AE, Blakey M
Journal of Vacuum Science & Technology B, 18(5), 2560, 2000
10 Analytic evaluation of the intensity point spread function
Gallatin GM
Journal of Vacuum Science & Technology B, 18(6), 3023, 2000