검색결과 : 11건
No. | Article |
---|---|
1 |
Response of Block Copolymer Thin-Film Morphology to Line-Width Roughness on a Chemoepitaxial Template Patrone PN, Gallatin GM Macromolecules, 47(14), 4824, 2014 |
2 |
Nanomanufacturing with DNA Origami: Factors Affecting the Kinetics and Yield of Quantum Dot Binding Ko SH, Gallatin GM, Liddle JA Advanced Functional Materials, 22(5), 1015, 2012 |
3 |
Modeling Line Edge Roughness in Templated, Lamellar Block Copolymer Systems Patrone PN, Gallatin GM Macromolecules, 45(23), 9507, 2012 |
4 |
Efficiency enhancement of copper contaminated radial p-n junction solar cells Boukai A, Haney P, Katzenmeyer A, Gallatin GM, Talin AA, Yang PD Chemical Physics Letters, 501(4-6), 153, 2011 |
5 |
Effect of resist on the transfer of line-edge roughness spatial metrics from mask to wafer Naulleau PP, Gallatin GM Journal of Vacuum Science & Technology B, 28(6), 1259, 2010 |
6 |
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes Goldfarb DL, Mahorowala AP, Gallatin GM, Petrillo KE, Temple K, Angelopoulos M, Rasgon S, Sawin HH, Allen SD, Lawson MC, Kwong RW Journal of Vacuum Science & Technology B, 22(2), 647, 2004 |
7 |
Statistical limitations of printing 50 and 80 nm contact holes by EUV lithography Gallatin GM, Houle FA, Cobb JL Journal of Vacuum Science & Technology B, 21(6), 3172, 2003 |
8 |
Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system Liddle JA, Blakey MI, Bolan K, Farrow RC, Gallatin GM, Kasica R, Katsap V, Knurek CS, Li J, Mkrtchyan M, Novembre AE, Ocola L, Orphanos PA, Peabody ML, Stanton ST, Teffeau K, Waskiewicz WK, Munro E Journal of Vacuum Science & Technology B, 19(2), 476, 2001 |
9 |
SCALPEL aerial image monitoring: Principles and application to space charge Gallatin GM, Farrow RC, Liddle JA, Waskiewicz WK, Mkrtchyan MM, Orphanos P, Felker J, Kraus J, Biddick CJ, Stanton S, Novembre AE, Blakey M Journal of Vacuum Science & Technology B, 18(5), 2560, 2000 |
10 |
Analytic evaluation of the intensity point spread function Gallatin GM Journal of Vacuum Science & Technology B, 18(6), 3023, 2000 |