검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Improved pattern transfer in nanoimprint lithography at 30 nm half-pitch by substrate-surface functionalization Jung GY, Li ZY, Wu W, Ganapathiappan S, Li XM, Olynick DL, Wang SY, Tong WM, Williams RS Langmuir, 21(14), 6127, 2005 |