검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influence of sputtering pressure on the structure and properties of ZrO2 films prepared by rf reactive sputtering Gao PT, Meng LJ, dos Santos MP, Teixeira V, Andritschky M Applied Surface Science, 173(1-2), 84, 2001 |
| 2 |
Study of ZrO2-Y2O3 films prepared by rf magnetron reactive sputtering Gao PT, Meng LJ, dos Santos MP, Teixeira V, Andritschky M Thin Solid Films, 377-378, 32, 2000 |
| 3 |
Influence of sputtering power and the substrate-target distance on the properties of ZrO2 films prepared by RF reactive sputtering Gao PT, Meng LJ, dos Santos MP, Teixeira V, Andritschky M Thin Solid Films, 377-378, 557, 2000 |