검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Determination of residual casting solvent concentration gradients in resist films by a "halt development" technique Gardiner AB, Burns S, Qin AW, Willson CG Journal of Vacuum Science & Technology B, 19(1), 136, 2001 |
| 2 |
Modeling solvent diffusion in photoresist Mack CA, Mueller KE, Gardiner AB, Sagan JP, Dammel RR, Willson CG Journal of Vacuum Science & Technology B, 16(6), 3779, 1998 |