검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Improved release strategy for UV nanoimprint lithography Garidel S, Zelsmann M, Chaix N, Voisin P, Boussey J, Beaurain A, Pelissier B Journal of Vacuum Science & Technology B, 25(6), 2430, 2007 |
| No. | Article |
|---|---|
| 1 |
Improved release strategy for UV nanoimprint lithography Garidel S, Zelsmann M, Chaix N, Voisin P, Boussey J, Beaurain A, Pelissier B Journal of Vacuum Science & Technology B, 25(6), 2430, 2007 |