검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Factors affecting profile evolution in plasma etching of SiO2 - Modeling and experimental verification La Magna A, Garozzo G Journal of the Electrochemical Society, 150(10), F178, 2003 |
| No. | Article |
|---|---|
| 1 |
Factors affecting profile evolution in plasma etching of SiO2 - Modeling and experimental verification La Magna A, Garozzo G Journal of the Electrochemical Society, 150(10), F178, 2003 |