검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Particle Formation Rates in Sulfur-Hexafluoride Plasma-Etching of Silicon Garrity MP, Peterson TW, Ohanlon JF Journal of Vacuum Science & Technology A, 14(2), 550, 1996 |
| 2 |
Fluid Simulations of Particle Contamination in Postplasma Processes Garrity MP, Peterson TW, Garrett LM, Ohanlon JF Journal of Vacuum Science & Technology A, 13(6), 2939, 1995 |