검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Arsenic doped buried plate characterization in deep trenches for a 0.25 mu m complementary metal-oxide-semiconductor technology by chemical etching Kruger D, Gaworzewski P, Kurps R, Schmidt K, Luhmann C Journal of Vacuum Science & Technology B, 18(1), 477, 2000 |
| 2 |
Electrical characterization of shallow pn junctions Gaworzewski P, Tittelbach-Helmrich K, Jacob K, Muller B Journal of Vacuum Science & Technology B, 16(1), 406, 1998 |
| 3 |
Atomic Layer Doping of SiGe by Low-Pressure (Rapid Thermal) Chemical-Vapor-Deposition Tillack B, Kruger D, Gaworzewski P, Ritter G Thin Solid Films, 294(1-2), 15, 1997 |
| 4 |
Characterization of B and Sb Delta-Doping Profiles in Si and Si1-xGex Alloys Grown by Molecular-Beam Epitaxy Kruger D, Gaworzewski P, Kurps R, Zeindl HP Journal of Vacuum Science & Technology B, 14(1), 341, 1996 |
| 5 |
Properties of Probe Tip Si Contacts and Their Connection to Spreading Resistance Analyses Gaworzewski P, Roos B, Borngraber J, Hoppner K, Hoppner W, Henniger U Journal of Vacuum Science & Technology B, 14(1), 373, 1996 |