화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Photoluminescence study of interfacial defects in direct-bonded silicon wafers
Nevin WA, Gay DL, Higgs V
Journal of the Electrochemical Society, 150(10), G591, 2003
2 The realization of silicon-on-insulator utilizing trench-before-bond and polish stop technology
Baine PT, Gay DL, Armstrong BM, Gamble HS
Journal of the Electrochemical Society, 145(5), 1738, 1998
3 Comparison of Si1-Ycy Films Produced by Solid-Phase Epitaxy and Rapid Thermal Chemical-Vapor-Deposition
Ray SK, Mcneill DW, Gay DL, Maiti CK, Armstrong GA, Armstrong BM, Gamble HS
Thin Solid Films, 294(1-2), 149, 1997