검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of GeF4 addition on the growth of hydrogenated microcrystalline silicon film by plasma-enhanced chemical vapor deposition Shirai H, Fukuda Y, Nakamura T, Azuma K Thin Solid Films, 350(1-2), 38, 1999 |
| No. | Article |
|---|---|
| 1 |
Effect of GeF4 addition on the growth of hydrogenated microcrystalline silicon film by plasma-enhanced chemical vapor deposition Shirai H, Fukuda Y, Nakamura T, Azuma K Thin Solid Films, 350(1-2), 38, 1999 |