검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Performance of adaptive alignment method on asymmetric signals Chen X, Ghazanfarian AA, McCord MA, Pease RFW Journal of Vacuum Science & Technology B, 16(6), 3637, 1998 |
| 2 |
Exploiting structure of wafer distortion in global alignment Ghazanfarian AA, Chen X, McCord MA, Fabian R, Pease W, Nguyen K, Levinson H Journal of Vacuum Science & Technology B, 16(6), 3642, 1998 |
| 3 |
Neural network model for global alignment incorporating wafer and stage distortion Ghazanfarian AA, Pease RFW, Chen X, McCord MA Journal of Vacuum Science & Technology B, 15(6), 2146, 1997 |
| 4 |
Accurate alignment on asymmetrical signals Chen X, Ghazanfarian AA, McCord M, Pease RFW Journal of Vacuum Science & Technology B, 15(6), 2185, 1997 |