검색결과 : 1건
No. | Article |
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1 |
Origins of Atmospheric Contamination in Amorphous-Silicon Prepared by Very High-Frequency (70 MHz) Glow-Discharge Kroll U, Meier J, Keppner H, Shah A, Littlewood SD, Kelly IE, Giannoules P Journal of Vacuum Science & Technology A, 13(6), 2742, 1995 |