검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
System performance modeling of extreme ultraviolet lithographic thermal issues Spence PA, Gianoulakis SE, Moen CD, Kanouff MP, Fisher A, Ray-Chaudhuri AK Journal of Vacuum Science & Technology B, 17(6), 3034, 1999 |
| 2 |
Thermal-mechanical performance of extreme ultraviolet lithographic reticles Gianoulakis SE, Ray-Chaudhuri AK Journal of Vacuum Science & Technology B, 16(6), 3440, 1998 |