검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Gas-Surface Chemical Reactions at High Collision Energies? Gordon MJ, Qin XD, Kutana A, Giapis KP Journal of the American Chemical Society, 131(5), 1927, 2009 |
| 2 |
Plasma interactions with high aspect ratio patterned surfaces: ion transport, scattering, and the role of charging Giapis KP, Hwang GS Thin Solid Films, 374(2), 175, 2000 |
| 3 |
Role of film conformality in charging damage during plasma-assisted interlevel dielectric deposition Hwang GS, Giapis KP Journal of Vacuum Science & Technology B, 17(3), 999, 1999 |
| 4 |
Inelastic scattering dynamics of hyperthermal fluorine atoms on a fluorinated silicon surface Minton TK, Giapis KP, Moore T Journal of Physical Chemistry A, 101(36), 6549, 1997 |
| 5 |
On the Origin of Charging Damage During Etching of Antenna Structures Hwang GS, Giapis KP Journal of the Electrochemical Society, 144(10), L285, 1997 |
| 6 |
The Role of the Substrate on Pattern-Dependent Charging Hwang GS, Giapis KP Journal of the Electrochemical Society, 144(12), L320, 1997 |
| 7 |
On the Origin of the Notching Effect During Etching in Uniform High-Density Plasmas Hwang GS, Giapis KP Journal of Vacuum Science & Technology B, 15(1), 70, 1997 |
| 8 |
Electron Irradiance of Conductive Sidewalls - A Determining Factor for Pattern-Dependent Charging Hwang GS, Giapis KP Journal of Vacuum Science & Technology B, 15(5), 1741, 1997 |
| 9 |
On the Link Between Electron Shadowing and Charging Damage Hwang GS, Giapis KP Journal of Vacuum Science & Technology B, 15(5), 1839, 1997 |
| 10 |
Hyperthermal Neutral Beam Etching Giapis KP, Moore TA, Minton TK Journal of Vacuum Science & Technology A, 13(3), 959, 1995 |