검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Graphite-based x-ray masks for deep and ultradeep x-ray lithography Coane P, Giasolli R, De Caro F, Mancini DC, Desta Y, Gottert J Journal of Vacuum Science & Technology B, 16(6), 3618, 1998 |
| No. | Article |
|---|---|
| 1 |
Graphite-based x-ray masks for deep and ultradeep x-ray lithography Coane P, Giasolli R, De Caro F, Mancini DC, Desta Y, Gottert J Journal of Vacuum Science & Technology B, 16(6), 3618, 1998 |