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| No. | Article |
|---|---|
| 1 |
Comparison of Advanced Plasma Sources for Etching Applications .3. Ion Energy-Distribution Functions for a Helicon and a Multipole Electron-Cyclotron-Resonance Source Gibson GW, Sawin HH, Tepermeister I, Ibbotson DE, Lee JT Journal of Vacuum Science & Technology B, 12(4), 2333, 1994 |