화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Pollen structure visualization using high-resolution laboratory-based hard X-ray tomography
Li Q, Gluch J, Kruger P, Gall M, Neinhuis C, Zschech E
Biochemical and Biophysical Research Communications, 479(2), 272, 2016
2 Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties
Wojcik H, Junige M, Bartha W, Albert M, Neumann V, Merkel U, Peeva A, Gluch J, Menzel S, Munnik F, Liske R, Utess D, Richter I, Klein C, Engelmann HJ, Ho P, Hossbach C, Wenzel C
Journal of the Electrochemical Society, 159(2), H166, 2012
3 TEM characterization of ALD layers in deep trenches using a dedicated FIB lamellae preparation method
Gluch J, Rossler T, Schmidt D, Menzel SB, Albert M, Eckert J
Thin Solid Films, 518(16), 4553, 2010
4 Electrical characterisation of HfYO MIM-structures deposited by ALD
Roessler T, Gluch J, Albert M, Bartha JW
Thin Solid Films, 518(16), 4680, 2010