검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Methods of producing plasma enhanced chemical vapor deposition silicon nitride thin films with high compressive and tensile stress Belyansky M, Chace M, Gluschenkov O, Kempisty J, Klymko N, Madan A, Mallikarjunan A, Molis S, Ronsheim P, Wang Y, Yang D, Li Y Journal of Vacuum Science & Technology A, 26(3), 517, 2008 |
| 2 |
Application of electron holography to analysis of submicron structures Gribelyuk MA, Domenicucci AG, Ronsheim PA, McMurray JS, Gluschenkov O Journal of Vacuum Science & Technology B, 26(1), 408, 2008 |
| 3 |
Growth kinetics of GaN and effects of flux ratio on the properties of GaN films grown by plasma-assisted molecular beam epitaxy Myoung JM, Gluschenkov O, Kim K, Kim S Journal of Vacuum Science & Technology A, 17(5), 3019, 1999 |