검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films Godavarthi S, Wang C, Verdonck P, Matsumoto Y, Koudriavtsev I, Dutt A, Tielens H, Baklanov MR Thin Solid Films, 575, 103, 2015 |
| 2 |
Blue to red emission from as-deposited nc-silicon/silicon dioxide by hot wire chemical vapor deposition Dutt A, Matsumoto Y, Santoyo-Salazar J, Santana-Rodriguez G, Godavarthi S Thin Solid Films, 595, 221, 2015 |
| 3 |
Size modulation of nanocrystalline silicon embedded in amorphous silicon oxide by Cat-CVD Matsumoto Y, Godavarthi S, Ortega M, Sanchez V, Velumani S, Mallick PS Thin Solid Films, 519(14), 4498, 2011 |