검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Real-time, in situ film thickness metrology in a 10 Torr W chemical vapor deposition process using an acoustic sensor Henn-Lecordier L, Kidder JN, Rubloff GW, Gogol CA, Wajid A Journal of Vacuum Science & Technology B, 21(3), 1055, 2003 |
| 2 |
Real-time growth rate metrology for a tungsten chemical vapor deposition process by acoustic sensing Henn-Lecordier L, Kidder JN, Rubloff GW, Gogol CA, Wajid A Journal of Vacuum Science & Technology A, 19(2), 621, 2001 |