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| No. | Article |
|---|---|
| 1 |
Effect of Ti-rich TiN as a Co-salicide capping layer for 0.15 um embedded flash memory devices and beyond Kim NS, Mukhopadhyay M, Wong WY, You YS, Zhao J, Lim B, Lee KS, Shukla D, Goh IS Thin Solid Films, 504(1-2), 20, 2006 |