검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Comparative study of trimethyl silane and tetramethylcyclotetrasiloxane-based low-k films Widodo J, Goh LN, Lu W, Mhaisalkar SG, Zeng KY, Hsia LC Journal of the Electrochemical Society, 152(4), G246, 2005 |
| 2 |
Effects of O-2 and He on the properties of the trimethyl silane based low-k films Widodo J, Goh LN, Lu W, Mhaisalkar SG, Ong S, Sudijono JL, Hsia LC, Tan PY, Zeng KY Journal of Vacuum Science & Technology B, 22(3), 1030, 2004 |