검색결과 : 1건
No. | Article |
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1 |
Influence of the process parameters on the properties of hydrogenated amorphous carbon thin films deposited using ECR plasma Piazza F, Arnal Y, Grambole D, Herrmann F, Kildemo M, Lacoste A, Relihan G, Golanski A Thin Solid Films, 383(1-2), 196, 2001 |