검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Synthesis of nanocrystalline silicon carbonitride films by remote plasma enhanced chemical vapor deposition using the mixture of hexamethyldisilazane with helium and ammonia Fainer NI, Rumyantsev YM, Golubenko AN, Kosinova ML, Kuznetsov FA Journal of Crystal Growth, 248, 175, 2003 |
| 2 |
On Thermodynamic Equilibria of Solid BN and Gas Phases in the B-N-H-Cl-He System Golubenko AN, Kosinova ML, Titov VA, Titov AA, Kuznetsov FA Thin Solid Films, 293(1-2), 11, 1997 |
| 3 |
Plasma-Deposited CdS Layers from (O-Phen)bis(Diethyldithiocarbamate) Cadmium Fainer NI, Rumyantsev YM, Salman EG, Kosinova ML, Yurjev GS, Sysoeva NP, Maximovskii EA, Sysoev SV, Golubenko AN Thin Solid Films, 286(1-2), 122, 1996 |