검색결과 : 2건
No. | Article |
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1 |
Estimation of diffusion lengths of acid and quencher in chemically amplified resist on the basis of extreme ultraviolet exposure results Tanaka Y, Kikuchi Y, Goo D, Oizumi H, Nishiyama I Journal of Vacuum Science & Technology B, 25(6), 2114, 2007 |
2 |
The Effect of a MgO Seed Layer on the Biepitaxial Growth of Y1Ba2Cu3O7-X Overlayers in Various Multilayered Thin-Films Lee S, Oh S, Goo D, Youm D Thin Solid Films, 258(1-2), 299, 1995 |