화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Estimation of diffusion lengths of acid and quencher in chemically amplified resist on the basis of extreme ultraviolet exposure results
Tanaka Y, Kikuchi Y, Goo D, Oizumi H, Nishiyama I
Journal of Vacuum Science & Technology B, 25(6), 2114, 2007
2 The Effect of a MgO Seed Layer on the Biepitaxial Growth of Y1Ba2Cu3O7-X Overlayers in Various Multilayered Thin-Films
Lee S, Oh S, Goo D, Youm D
Thin Solid Films, 258(1-2), 299, 1995