검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Monte Carlo sensitivity analysis of CF2 and CF radical densities in a c-C4F8 plasma Bose D, Rauf S, Hash DB, Govindan TR, Meyyappan M Journal of Vacuum Science & Technology A, 22(6), 2290, 2004 |
| 2 |
Neural network modeling of growth processes Venkateswaran S, Rai MM, Govindan TR, Meyyappan M Journal of the Electrochemical Society, 149(2), G137, 2002 |
| 3 |
Characterization of showerhead performance at low pressure Hash DB, Mihopoulos T, Govindan TR, Meyyappan M Journal of Vacuum Science & Technology B, 18(6), 2808, 2000 |
| 4 |
Feature profile evolution simulation using a level set method Hwang HH, Govindan TR, Meyyappan M Journal of the Electrochemical Society, 146(5), 1889, 1999 |
| 5 |
A continuum model for the inductively coupled plasma reactor in semiconductor processing Bose D, Govindan TR, Meyyappan M Journal of the Electrochemical Society, 146(7), 2705, 1999 |