검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Electron transport, ionization, and attachment coefficients in C2F4 and C2F4/Ar mixtures Goyette AN, de Urquijo J, Wang YC, Christophorou LG, Olthoff JK Journal of Chemical Physics, 114(20), 8932, 2001 |
| 2 |
Ion compositions and energies in inductively coupled plasmas containing SF6 Goyette AN, Wang YC, Olthoff JK Journal of Vacuum Science & Technology A, 19(4), 1294, 2001 |
| 3 |
Ion fluxes and energies in inductively coupled radio-frequency discharges containing C2F6 and c-C4F8 Goyette AN, Wang YC, Misakian M, Olthoff JK Journal of Vacuum Science & Technology A, 18(6), 2785, 2000 |
| 4 |
Measurement of C6H6 densities in a diamond deposition system Goyette AN, Anderson LW, Peck JR, Lawler JE Journal of Chemical Physics, 110(9), 4647, 1999 |
| 5 |
C-2 column densities in H-2/Ar/CH4 microwave plasmas Goyette AN, Matsuda Y, Anderson LW, Lawler JE Journal of Vacuum Science & Technology A, 16(1), 337, 1998 |