검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Polishing behaviors of ceria abrasives on silicon dioxide and silicon nitride CMP Oh MH, Nho JS, Cho SB, Lee JS, Singh RK Powder Technology, 206(3), 239, 2011 |
| No. | Article |
|---|---|
| 1 |
Polishing behaviors of ceria abrasives on silicon dioxide and silicon nitride CMP Oh MH, Nho JS, Cho SB, Lee JS, Singh RK Powder Technology, 206(3), 239, 2011 |