검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing Boufnichel M, Aachboun S, Grangeon F, Lefaucheux P, Ranson P Journal of Vacuum Science & Technology B, 20(4), 1508, 2002 |
| 2 |
Rapid deposition of hydrogenated microcrystalline silicon by a high current DC discharge Franz D, Grangeon F, Delachaux T, Howling AA, Hollenstein C, Karner J Thin Solid Films, 383(1-2), 11, 2001 |