검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Low temperature epitaxy of high-quality Ge buffer using plasma enhancement via UHV-CVD system for photonic device applications Alharthi B, Dou W, Grant PC, Grant JM, Morgan T, Mosleh A, Du W, Li BH, Mortazavi M, Naseem H, Yu SQ Applied Surface Science, 481, 246, 2019 |
| 2 |
Evaluation of lanthanum based gate dielectrics deposited by atomic layer deposition Triyoso DH, Hegde RI, Grant JM, Schaeffer JK, Roan D, White BE, Tobin PJ Journal of Vacuum Science & Technology B, 23(1), 288, 2005 |
| 3 |
Relaxation of strained Si layers grown on SiGe buffers Samavedam SB, Taylor WJ, Grant JM, Smith JA, Tobin PJ, Dip A, Phillips AM, Liu R Journal of Vacuum Science & Technology B, 17(4), 1424, 1999 |
| 4 |
Deposition of AlN at Lower Temperatures by Atmospheric Metalorganic Chemical-Vapor-Deposition Using Dimethylethylamine Alane and Ammonia Kidder JN, Kuo JS, Ludviksson A, Pearsall TP, Rogers JW, Grant JM, Allen LR, Hsu ST Journal of Vacuum Science & Technology A, 13(3), 711, 1995 |
| 5 |
Tungsten Plug Etchback and Substrate Damage Measured by Atomic-Force Microscopy Allen LR, Grant JM Journal of Vacuum Science & Technology B, 13(3), 918, 1995 |